美國BIRD功率計鳥牌4421 射頻功率計參數(shù)

 適用于半導(dǎo)體的生產(chǎn)和科研領(lǐng)域，讀 數(shù)誤差+/-3%

● 采用液晶背光顯示，可對正反向功率 及駐波比等進(jìn)行三位半數(shù)字顯示

● 功率測試范圍可人工或自動設(shè)置，并有 GPIB和RS-232接口供選擇

功率范圍: 100mW-10kW

頻率范圍: 100kHz-2.5GHz

駐波比范圍: 1.0-199.9

讀數(shù)誤差: ±3%

功能: 測量正反向功率，通過W和dBm顯示:測量駐波比及回波損耗，通過dB顯示; 以及測量最大最小值 顯示: 三位半液晶背光顯示

工作電源: AC和電池兩種，115/230AC，50/60Hz或8節(jié)1.2V鎳鎘電池

尺寸: 312X309X108mm

接口選項: IEEE-488接口或RS-232接口

BIRD(鳥牌)4421功率計

Precision Power Meter for Semiconductor Processing Applications

• ±1% uracy - plished through the use of sensors with an

automatic frequency compensation scheme, where the error contributions

due to directional coupler frequency response characteristics are

eliminated.

• Wide Dynamic Range - The instrument will meet the full uracy

specification over a 35 dB dynamic range.

• Excellent Measurement Repeatability - Typically <0.1%

• Digital Display - Along with automatic VSWR calculation

• Computer Interface - RS-232 and IEEE-488 standard

The Bird® Model 4421 is a precision RF power meter that, while

originally intended for general purpose laboratory applications where

high uracy is required, has found wide eptance in semiconductor

processing applications. The product is configured as a system,

consisting of the Model 4421 digital display and a precision power

sensor selected for the application based upon maximum power

and operating frequency.

MODEL 4421 MULTIFUNCTION POWER METER

Power Range: 100 mW to 25 kW FS

Frequency Range : 100 kHz - 1 GHz

VSWR Range: 1.0 - 199.9

Functions : Forward and reflected power in W or dBm, VSWR,

return loss in dB and min./max. values

Overrange : Audible warning when RF power input exceeds

120% of sensor's maximum power range

Indication Display: 3 1/2 digit-liquid crystal display with indicator

for mode, measurement units, battery condition,

programming status, and trend arrows.

Switchable backlight.

美國BIRD功率計鳥牌4421 射頻功率計參數(shù)

Operating Power : 115/230 VAC, 50/60 Hz or 8 nickel metal hydride

1.2 V cells (NEDA type 10014)

Nominal Size : 12 9/32" L x 12 5/32" W x 4 1/4" H

(312 mm x 309 mm x 108 mm)

with handle extended 15 7/16" L (392 mm)

Weight : 11 lbs. (5 kg.)

Interconnects: 1 meter latch-n-lock coiled cable

Interfaces: IEEE-488 and RS-232 standard

Dimensions : 4 1/2" x 6 1/2" (114 x 165 mm)

Required Product: RF Power Sensor

essories: Case 4300A215 (page 43)

19" Panel Mount Kit 4421-250

Latch & Lock Case 4421-038

功率傳感器

4020系列功率傳感器

Model(型號)

Frequency Range(頻率范圍)

Power Input(功率范圍)

4021

1.8-32 MHz

300 mW to 1 kW (1.2 kW max.)

4022

25-1000 MHz

300 mW to 1 kW (1.2 kW max.)

4024

1.5-32 MHz

3 W to 10 kW (12 kW max.)

4025

100-2500 kHz

3 W to 10 kW (12 kW max.)

4027A系列功率傳感器

Model(型號)

Frequency Range(頻率范圍)

Power Input(功率范圍)

4027A250K

250-400 kHz

3 W to 10 kW

4027A400K

400-550 kHz

3 W to 10 kW

4027A800K

800-950 kHz

3 W to 10 kW

4027A2M

1.5-2.5 MHz

3 W to 10 kW

4027A4M

3-5 MHz

3 W to 10 kW

4027A10M

10-15 MHz

3 W to 10 kW

4027A12M

10-15 MHz

300 mW to 1kW

4027A25M

25-30 MHz

3 W to 9 kW

4027A35M

35-45 MHz

3 W to 7.5 kW

4027A60M

45-65 MHz

3 W to 6 kW

4027A100M

95-105 MHz

3 W to 4 kW

4027A150M

150-170 MHz

3.75 W to 3.75 kW

4027F系列過濾型傳感器

Model(型號)

Frequency Range(頻率范圍)

Power Input(功率范圍)

4027F2M

1.8-2.2 MHz

100 W to 10 kW